Valley-fold and mountain-fold in the micro-origami technique
نویسندگان
چکیده
A method to make two types of hinges which bend toward opposite directions from the same epitaxial layers using the micro-origami technique is proposed and successfully applied to make standing micro-stages on a GaAs substrate. This method opens a path to fabricate more complex three-dimensional self-positioned micro-machined structures. q 2003 Elsevier Science Ltd. All rights reserved.
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عنوان ژورنال:
- Microelectronics Journal
دوره 34 شماره
صفحات -
تاریخ انتشار 2003